MEMS materials and processes handbook
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...
| Other Authors: | Ghodssi, Reza,, Lin, Pinyen,, SpringerLink (Online service) |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
New York ; London :
Springer,
2010.
|
| Physical Description: |
1 online resource (xxxv, 1187 pages) : illustrations (some color). |
| Series: |
MEMS reference shelf.
|
| Subjects: |
CMU Electronic Access
Electronic Resource Click Here| Location | Call Number: | Status |
|---|---|---|
| CMU Electronic Access | Available |