Handbook of plasma immersion ion implantation and deposition

Other Authors: Anders, André.
Format: Book
Language: English
Published: New York : Wiley, 2000.
Physical Description: xxiii, 736 pages : illustrations ; 25 cm.
Subjects:

CMU Main Books 3rd Floor

LocationCall Number: Status
CMU Main Books 3rd Floor TS695.25 .H36 2000 Available
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