Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption
| Other Authors: | Baghdadi, A., Scace, Robert I., Walters, E. Jane., National Institute of Standards and Technology (U.S.) |
|---|---|
| Format: | Microfilm |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
[1989]
|
| Physical Description: |
x, 168 pages : illustrations ; 28 cm. |
| Series: |
NIST special publication ;
400-82. Semiconductor measurement technology. |
| Subjects: |
CMU Storage Gov Pub Microfiche
| Location | Call Number: | Status |
|---|---|---|
| CMU Storage Gov Pub Microfiche | C 13.10:400-82 | Available |